Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas - DatasetThis data set contains the data shown in the corresponding publication in Plasma Sources Science and Technology (https://doi.org/10.1088/1361-6595/acb815). This publication presents the first implementation of terahertz (THz) quantum cascade lasers (QCLs) for high-resolution absorption spectroscopy on plasmas. Absolute densities of ground state atomic oxygen were directly obtained by using the fine structure transition at approximately 4.75 THz. Measurements were performed on a low-pressure capacitively coupled radio frequency oxygen discharge. The results show that the presented method is well suited to measure atomic oxygen densities, and it closes the THz gap for quantitative atomic density measurements in harsh environments such as plasmas.

]]>Plasma Chemical Processesb2722fbc-7f1b-422a-9ced-b586eefc162b2023-01-16T15:14:42+01:002023-02-06T21:55:30+01:00enINP, PDI, PTB BerlinTerahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas - Fig. 2Simulated transmission spectra (T = 296 K) of ammonia and atomic oxygen from the HITRAN spectral database (https://doi.org/10.1016/j.jqsrt.2021.107949).

]]>2023-02-02T17:49:55+01:002023-02-03T15:33:40+01:00text/csvcsv561962https://gitlab.inptdat.de/dataset/terahertz-absorption-spectroscopy-measuring-atomic-oxygen-densities-plasmas-dataset/resourceTerahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas - Fig. 3Raw spectrum from a simultaneous measurement of a reference gas cell with NH3 (p=2 mbar, L=15 cm) and an O2 plasma (p=1.3 mbar, P=30 W), measured with a laser temperature of 44.30 K.

]]>2023-02-02T17:53:32+01:002023-02-03T15:33:40+01:00text/csvcsv1788328https://gitlab.inptdat.de/dataset/terahertz-absorption-spectroscopy-measuring-atomic-oxygen-densities-plasmas-dataset-0Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas - Fig. 4Comparison of the absorption spectra of a reference gas cell with NH3 (p=0.01 mbar, L=3 cm), showing the sR(7,3)-transition of 14NH3 at 158.214792 cm-1, for different laser tuning speeds and a laser temperature of 54.45 K.

]]>2023-02-02T17:57:33+01:002023-02-03T15:33:40+01:00text/csvcsv1222571https://gitlab.inptdat.de/dataset/terahertz-absorption-spectroscopy-measuring-atomic-oxygen-densities-plasmas-dataset-1Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas - Fig. 5Spectral absorption profile of the sR(7,3)-transition of 14NH3 at 158.214792 cm-1, measured in a reference gas cell with NH3 (p=0.01 mbar, L=3 cm) using a laser tuning speed of 100 mA/s and a laser temperature of 54.45 K. The Gaussian function that was fitted to the profile and the corresponding residual are given in the data file as well.

]]>2023-02-02T18:00:10+01:002023-02-03T15:33:40+01:00text/csvcsv1161528https://gitlab.inptdat.de/dataset/terahertz-absorption-spectroscopy-measuring-atomic-oxygen-densities-plasmas-dataset-2Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas - Fig. 6Spectral absorption profile of the R(7,5)-transition of 15NH3 at 158.257314 cm-1, measured in a reference gas cell with NH3 (p=0.89 mbar, L=15 cm) using a laser tuning speed of 200 mA/s and a laser temperature of 44.30 K. The Voigt function that was fitted to the profile and the corresponding residual are given in the data file as well.

]]>2023-02-02T18:04:50+01:002023-02-03T15:33:40+01:00text/csvcsv1580822https://gitlab.inptdat.de/dataset/terahertz-absorption-spectroscopy-measuring-atomic-oxygen-densities-plasmas-dataset-3Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas - Fig. 7Spectral absorption profile of the fine structure transition of atomic oxygen at 158.268741 cm-1, measured in a CCRF O2 discharge (p=1.3 mbar, P=30 W) using a laser tuning speed of 74 mA/s and a laser temperature of 44.30 K. The Gaussian function that was fitted to the profile and the corresponding residual are given in the data file as well.

]]>2023-02-02T18:08:41+01:002023-02-03T15:33:40+01:00text/csvcsv1566781https://gitlab.inptdat.de/dataset/terahertz-absorption-spectroscopy-measuring-atomic-oxygen-densities-plasmas-dataset-4Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas - Fig. 8Comparison of atomic oxygen densities as a function of the applied RF power for different pressures.

]]>2023-02-02T18:10:18+01:002023-02-03T15:33:40+01:00text/csvcsv835https://gitlab.inptdat.de/dataset/terahertz-absorption-spectroscopy-measuring-atomic-oxygen-densities-plasmas-dataset-5DKANhttps://gitlab.inptdat.de