The invention relates to a system (1) for generating and controlling a non-thermal atmospheric pressure plasma, comprising: - a discharge space (10) into which a working gas can be introduced via a first opening (12), wherein a plasma (5) can be generated in the discharge space (10), wherein the discharge space (10) has a second opening (14), so that the plasma (5, 6) can exit from the discharge space (10) through this second opening (14) and - at least one high-voltage electrode (20) for generating an electromagnetic field for generating a plasma (5) in the discharge space (10). The plasma (5, 6) exiting through the second opening (14) is controlled by a throughflow controller (40) of the system (1), which throughflow controller (40) is designed to adjust a volume flow (60) of the working gas through the first opening (12) from a working gas source (50) into the discharge space (10). In this case, the throughflow controller (40) is further designed to assume at least a first state and a second state, wherein in the first state no working gas is supplied from the working gas source (50) to the discharge space (10), so that no plasma (5) exits from the second opening (14) even when there is a generated electromagnetic field in the discharge space (10), and wherein in the second state the working gas is supplied from the working gas source (50) to the discharge space (10), a plasma (5) is generated in the discharge space (10) and the plasma (5, 6) exits from the second opening (14).
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Figure 1 of the Patent Specification
WO2021064242A1
1. System (1) for generating and controlling a non-thermal atmospheric pressure plasma with:
- a discharge chamber (10) into which a working gas can be introduced via a first opening (12), wherein a plasma (5) can be generated in the discharge chamber (10), wherein the discharge chamber (10) has a second opening (14) so that the plasma (5, 6) can exit the discharge chamber (10) through this second opening (14), at least one high-voltage electrode (20) for generating an electromagnetic field for generating a plasma (5) in the discharge chamber (10), characterized in that the plasma (5, 6) exiting through the second opening (14) is controlled by a flow regulator (40) of the system (1), which is designed to set a volume flow (60) of the working gas through the first opening (12) from a working gas source (50) into the discharge chamber (10), wherein the flow regulator (40) is further designed to have at least a first state and a second state wherein in the first state no working gas is supplied from the working gas source (50) to the discharge space (10), so that even when an electromagnetic field is generated in the discharge space (10) no plasma (5) emerges from the second opening (14), and wherein in the second state the working gas is supplied from the working gas source (50) to the discharge space (10), a plasma (5) is generated in the discharge space (10) and the plasma (5, 6) emerges from the second opening (14).
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