high frequency

Non-thermal atmospheric pressure plasma jet (ntAPPJ)

Materials / Surfaces

The non-thermal atmospheric pressure plasma jet (ntAPPJ) is composed of a quartz capillary with an inner diameter of 4 mm and an outer diameter of 6 mm. The plasma jet operates at a high frequency of 27.12 MHz in pure noble gases (helium, neon, argon, krypton) at flow rates between 0.1 and 2 slm. Small molecular gas admixtures or organic vapors can be added to the carrier gas. Two outer ring electrodes (width 5 mm, distance 5 mm) are adjusted concentrically with the capillary axis.

HelixJet

Materials / Surfaces

The HelixJet is a capacitively coupled radio-frequency (RF) plasma source operating at atmospheric pressure. The RF power is applied to two double helix electrodes. The electrodes are placed outside a quartz tube fed by the working gas. The HelixJet has unique features highly relevant for practical applications. The innovative double helix electrode design enables extremely stable and homogeneous plasma conditions at low gas flow rates. This plays a crucial role for the quality and reproducibility of several applications, e.g.

Device, system, and method for antimicrobial treatment, method for producing the device, and computer program

Plasma Medicine

The invention relates to a device, to a system, and to a method for antimicrobial treatment during performance of operations in bodies, to a method for producing the device, and to a computer program. A device (11) is provided for antimicrobial treatment during performance of operations, in particular minimally invasive operations, in bodies. Said device comprises a main body (1) for partial introduction into a body and at least one plasma source (12) arranged in at least one portion of the main body (1).

Ar metastable densities (³P₂) in the effluent of a filamentary atmospheric pressure plasma jet with humidified feed gas - dataset

The Ar(³P₂) metastable density in the effluent of the cold atmospheric pressure plasma jet kINPen-sci was investigated as a function of the feed gas humidity, the gas curtain composition, and the distance from the nozzle by means of laser atomic absorption spectroscopy. The data set comprises the axial distributions of the Ar metastables as a function of these parameters.

Plasma Chemical Processes

On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes

The temporal behavior of the molecular etching product SiF4 in fluorocarbon-based plasmas used for the dry etching of ultra low-k (ULK) materials has been brought into connection with the polymer deposition on the surface during plasma treatment within the scope of this work. For this purpose, the density of SiF4 has been measured time-resolved using quantum cascade laser absorption spectroscopy (QCLAS).

Materials / Surfaces
Plasma Chemical Processes

High-speed thermal microscopy of plasma microprinting at atmospheric pressure

The HelixJet (https://www.inptdat.de/helixjet) was applied to simultaneous melting and plasma treatment of polyamide (PA 12) microparticles (diameter 60 µm) used conventionally for 3D printing by laser sintering. This proof-of-principle experiment demonstrated that gaussian thickness profiles of PA 12 can be printed using the HelixJet with a rapid rate of 200 mg/s (peak growth 2 mm/s) and with advantageous material properties. The key element of this novel process is the self-regulated balance between material melting and plasma quenching.

Materials / Surfaces

Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas

The dataset contains data from comparative studies of capacitively coupled radio-frequency (CCRF) discharges in helium and argon at pressures between 10 and 80 Pa applying two different fluid modeling approaches as well as two independently developed particle-in-cell Monte Carlo collision (PIC-MCC) codes. The dataset provides a test bed for future studies of simple ccrf discharge configurations in helium and argon at pressures ranging from 10 to 80 Pa.

Plasma Chemical Processes

Correlation of helicality and rotation frequency of filaments in the ntAPPJ

The self-organized behaviour (locked mode) of filaments in the non-thermal atmospheric pressure plasma jet (ntAPPJ) couples a spatial patterning of the discharge (helical symmetry) and a regular motion (steady rotation). The dataset represents the mean rotation frequency of filaments in the capillary with a diameter of 4 mm and the corresponding geometric characteristics: helicality and/or filament inclination angles were measured along with the gas temperature under varying discharge conditions (electric power and argon flow rate).

Materials / Surfaces