low pressure

The temporal behavior of the molecular etching product SiF4 in fluorocarbon-based plasmas used for the dry etching of ultra low-k (ULK) materials has been brought into connection with the polymer deposition on the surface during plasma treatment within the scope of this work. For this purpose, the density of SiF4 has been measured time-resolved using quantum cascade laser absorption spectroscopy (QCLAS).

The electron swarm parameters (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in C2H6 (ethane) are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The dataset contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations, using solutions of the electron Boltzmann equation and Monte Carlo simulations.

The electron swarm parameters (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in C2H4 (ethylene) are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The dataset contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations, using solutions of the electron Boltzmann equation and Monte Carlo simulations.

The electron swarm parameters (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in C2H2 (acetylene) are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The dataset contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations, using solutions of the electron Boltzmann equation and Monte Carlo simulations.

The dataset contains data from comparative studies of capacitively coupled radio-frequency (CCRF) discharges in helium and argon at pressures between 10 and 80 Pa applying two different fluid modeling approaches as well as two independently developed particle-in-cell Monte Carlo collision (PIC-MCC) codes. The dataset provides a test bed for future studies of simple ccrf discharge configurations in helium and argon at pressures ranging from 10 to 80 Pa.